6) PFEIFFER TPG 256A > VACUUM GAUGE

-사용사능한센서 : TPR,PCR, IKR, PKR, IMR, PBR, CMR/ACR, APR 

• TPR : Pirani gauge

• PCR : Combined Pirani/Capacitance gauge

• IKR : Cold cathode gauge

• PKR : Combined Pirani/cold cathode gauge

• IMR : Hot ionization gauge High Pressure(HP)

• PBR : Combined Pirani/Bayard-Alpert hot cathode ionization gauge (BA)

• CMR/ACR : Capacitive gauge

• APR  : Piezoresistive gauge